University of Pennsylvania - ESE 529ESE529_Spring2020_lecture21_MicromechanicalResonators

Document Content and Description Below

ESE 529 Introduction to MEMS and NEMS Lecture 21 Troy Olsson Assistant Professor Department of Electrical and Systems Engineering [email protected] Project Details  All Teams have bee... n formed  Rubrics posted on Canvas  4-page paper due on 4/293 Micromechanical Resonator/Filter Outline • What are microacoustic resonators • Functional description • What is special about microacoustic resonators • Applications for microacoustic resonators • Microacoustic resonator basics • Equivalent circuit models • Figures of merit • Transduction techniques (piezoelectric and capacitive) • Vibration modes • Materials • Temperature compensation • Microacoustic resonator and resonator based circuit examples • Filters • Oscillators [Show More]

Last updated: 1 year ago

Preview 1 out of 41 pages