University of Pennsylvania - ESE 529ESE529_Spring2020_lecture09_piezoresistivesensing1

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ESE 529 Introduction to MEMS and NEMS Lecture 9 Troy Olsson Assistant Professor Department of Electrical and Systems Engineering [email protected] Lecture ‡ Last Time • We finished o... ur study of the dynamic response of MEMS devices • We learned to solve for the stress and strain in bending beams ‡ Today ‡ We will study piezoresistive sensing, which will convert stress into a change in resistance that can be measured electrically ‡ This is the first of a series of MEMS transducers we will study3 Piezoresistive Strain Sensing [Show More]

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